主催: 一般社団法人 日本機械学会
会議名: 第9回マイクロ・ナノ工学シンポジウム
開催日: 2018/10/30 - 2018/11/01
In this study, we proposed and developed a method of patterning electret using thermal imprinting method. Electric charge was uniformly injected to the unpatterned electret film made of a fluoropolymer. Then, a glass mold, on which linear protrusions are arranged at regular intervals, was pressed against the electret film after being heated. As a result, electric charge was disappeared from parts of the electret where the heated protrusions were pressed. The surface potential of the electret was decreased by the thermal imprinting from approximately -1000V to -400 V when temperature of the glass mold is 80°C. A rotary energy harvester was developed using the thermal imprinted electret pattern. The number of electrode poles is 50. The gap between upper and lower electrodes is about 0.5 mm. The electric power of 0.12 μW was output when the energy harvester was rotated at 10 Hz.