抄録
Microformability of superplastic materials and microforming techniques are shown. The materials are fine grained Al-78Zn alloy, transformation superplastic pure iron and new amorphous alloys. The microformability test of each material was done. In the'case of Al-78Zn alloy, microformability depends on the grain size of polycrystalline aggregates. Amorphous alloys reveal perfect Newtonian viscous flow characteristics in the supercooled liquid state and furthermore exhibit an excellent property of microformability on a submicron scale. Microforming techniques are shown as follows; microextrusion with micro-dies made of photochemically machinable glass and made oflaser-micromachined polyimide, submicron imprinting with silicon die fabricated by EB lithography and etching, microforging of microgear of 10 μm in module with microdie fabricated by UV-LIGA process. As a result, bulk metallic glasses(amorphous alloys) are expected to become some of the most useful materials for fabricating MEMS.
