抄録
Diamond-like carbon (DLC) films were prepared on SiO_2 substrates by the rf-magnetoron sputtering using a sintered diamond target. It was found that the optical transmittance of the DLC film grown from sintered diamond target with an Ar ion laser beam was about fourfold lager than that grown from graphite target. DLC films were also grown on SUS630 steel substrates by DC-discharge plasma CVD. The nano-indentation hardness test and the ball-on-disk wear test were performed on the DLC coated SUS630 substrates, and the results of these tests revealed that not only the hardness but also the wear resistance of SUS 630 substrates were significantly improved by the DLC coating.
