機械材料・材料加工技術講演会講演論文集
Online ISSN : 2424-287X
セッションID: 910
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910 サファイアにおける研磨特性の結晶方位依存性の研究
岡田 睦鈴木 浩文犬飼 力鈴木 敏一東 保男青柳 忍
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In the telescopic interferometer KAGRA (Large-scale Cryogenic Gravitational wave Telescope), the mirror made of sapphire (α-alumina) is required. The focal length of mirror is 7 km and it must be finished by polishing after grinding. In order to polish the mirror precisely, polishing characteristics of the Sapphire must be researched. In this study, the polishing characteristics are examined and the dependence of the crystal orientation on the polishing rates is researched. In the experiment, Sapphire wafer is polished by using rotational small tool and SiO_2 abrasive.

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