抄録
This paper describes novel process to fabricate freestanding micro-structure of metal thin-film using transfer printing Au thin-film is deposited on a PDMS or h-PDMS stamp This stamp is contacted on a micro-grooved photoresist surface Au thin-films are successfully transferred and formed micro-beams on micro-grooves Their length, width and thickness are 50μm, 50μm and 75nm, respectively Moreover, production yield is improved with increasing film thickness We demonstrate this process can be utilized for micro-mechanical elements fabrication
