抄録
Synchronous belt is used for the robot arm in order to carry FPD and wafer because it can be reduced weight, noise, and energy loss. However, it is known that the transmission error is generated by essential meshing between the belt and pulley teeth. In the present study, the positioning error of robot arm under the installation tension and quasi-static conditions was investigated analytically when the 1st arm of robot was rotated in bidirectional operation. In analysis of the positioning error, ABAQUS Version 6.4 was used. It is found that the positioning error is generated for the transmission error occurred by a change in contact state between the belt and pulley tooth flanks. When the pitch difference between the belt and pulley pitches and the installation tension are chosen appropriately, the positioning accuracy is improved.
