抄録
The purpose of our research is to establish a simulation method to evaluate the manufacturing systems considering the energy consumption and the productivity concurrently. In this paper, firstly requirements for simulation to evaluate the energy consumption and the productivity are analyzed. Secondly a simulation method considering the requirements is proposed. A UML model that is defined facility state transitions and relationships between the facility state and the energy consumption is proposed. Manufacturing system simulation that is implemented in the proposed UML model is also proposed and developed. A system that provides a function to visually evaluate dynamical changes of the energy consumption per unit of the production throughput along time by our proposed simulation is also proposed and developed. Finally a case study for semiconductor manufacturing systems is carried out to confirm efficiency of our proposed simulation method.
