抄録
In this paper, the micro thermal system (MTS) is defined as a thermohydraulic or thermally driven system with a much smaller total size or component than the conventional ones by using micro processing technology, and the present status and future directions of MTS are overviewed. First, focusing on information technology as an example, the demands for new MTSs are summarized. Next, the following phenomena are introduced as the thermohydraulic phenomena emerging in small spaces; enhanced diffusion effects of oscillating flows in micro channels, unusual heat transfer characteristics in micro channels, functional micro bubbles and intensive evaporation in the interline region of evaporating meniscus. Finally, as the typical examples of MTS, discussed are the microminiature refrigeration, thin-plate heat spreaders, fine-tube heat transport devices and micro channel heat sinks.
