抄録
In the case of semiconductor silicon single crystal growth process by the Czochralski method, it is considered that degradation of the crystal homogeneity may be caused by the Marangoni convection. In coating manufacturing processes using polymer solution, 2-dimensional distribution of surface tension may arise due to temperature and concentration distributions of the organic solvent. In the present study, the surface tension scanning apparatus has been improved, which employs surface laser-light scattering technique (SLLS). In order to confirm the applicability of newly improved apparatus, some preliminary measurements were performed; (1) fixed point measurements of ethanol with open and closed air, (2) fixed point measurement as a function of time and (3) 2-dimensional distribution measurement. Results of the measurements indicate that the present apparatus has a potential to observe 2-dimensional distribution of surface tension "in situ".
