Abstract
The heater array considered to be effective in nano-technology research especially heat physical-properties measurement in nano scale and the experiment about a heating action was designed. It is the 1000×1000 heater array whose interval is less than 1-micrometer. By taking in a thin film diode to the wiring, the number of wiring is reduced sharply. The validity of this heater array was verified in respect theoretical heat diffusion model.
