The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2003
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A Micro Ultrasonic Motor using a Micro-machined Cylindrical Bulk Piezoelectric Vibrator
T. Kanda, T. Ono, K. Suzumori, T. Morita, M. Kurosawa
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 11-

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[in Japanese]
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© 2003 The Japan Society of Mechanical Engineers
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