抄録
Conventional pneumatic cylinder is difficult to be used for positioning servo system, and difficult to be miniaturized. In this research, we succeed in developing an intelligent cylinder that had the function of detecting position of the piston. The piston rod has stripes fabricated by YAG laser. The stripes are detecting by a micro optical encoder. This rod stripes are made every 0.338 millimeters. We made several prototypes of stripe pitch from 0.338 millimeters to 0.169 millimeters of positioning accuracy of this cylinder.
