1A1-C34 Study on The Micro Manipulation System in a SEM with CCD Camera

Abstract

At present, very small gear and electrostatic motor are fabricated on silicon substrate using semiconductor micro processing technology, and it becomes necessity to process of these micro components. But, handling technology that can handle micro elements, as small as several to several ten micrometers, has not been developed yet. To solve this problem, we specially process diamond material and design end effector that handle micro elements. At manufactured micro 3 axis stage by way of trial that can identify the location of stage by submicron resolution and put in chamber of SEM. We add a CCD camera as an observation system for assistance in SEM.