抄録
This paper presents a pneumatically driven PDMS peristaltic micro pump for both gas and liquid. Micro pump consists of the three peristaltic-type actuators. Micro pump is fabricated by SU8 mold process and the two-step curing process for irreversible bonding of PDMS layers. The diameter and the thickness of the actuator diaphragm are 1mm and 30μm, respectively. The total size of micro pump is about 5mm x 5.5mm. Micro pump can deliver both gas and liquid. Perfect peristaltic motions and robust pumping actions of the micro pump are confirmed by the flow rate test of micro pump with the air and the ink.
