抄録
This research aims to realize a flexible displacement sensor that can be attached in a soft actuator. The fabricated flexible sensor is composed of piezoelectric polymer, conductive paste and rubber base. Piezoelectric polymer: poly(vinylidene fluoride-trifluoroethylene) [P(VDF/TrFE)] was used for the detection of displacement of flexible sensors and conductive paste was used for electrodes. These sensors were attached in FMA(Flexible Microactuator). Displacement of FMA and the sensor output voltage were compared, and sensing characteristics were evaluated. Furthermore, servo control of FMA using the sensor was performed. As a result, high positioning accuracy was verified.