1A2-O05 FIB-CVD End Effectors Nano Temperature Sensor : For Local Temperature Sensing in Water Environment

Abstract

FIB-CVD has proven its great potential in the fabrication of 3D nano-structured devices with high precision and accuracy. In this paper, we show the fabrication of a FIB-CVD nano temperature sensor over the tip of a cantilever, to act as an end-effectors temperature sensor. The FIB-CVD temperature sensors were constructed by consequent deposition and etching of tungsten over a piezo type AFM cantilevers which have built in electrodes. The sensor was calibrated in water using the heating stage of an environmental scanning electronic microscope. The experimental results demonstrate the great potential of FIB-CVD thermal sensors for sensing temperature in different environments