Abstract
An ultra precision positioning actuator with large force and long stroke has been proposed. This actuator is driven by piezoelectric(PZT) actuators. In order to design the actuator which utilizes the large force of PZT actuator, it is necessary to design the actuator which has high stiffness. But there are many factors which decrease this stiffness, such as manufacturing error, contact deformation, clearance between its output link and clamp, individual difference of PZT actuator's length. Then, mechanisms which adjust these factors and an actuator with these mechanisms have been proposed. Besides, driving method which increases output force by increasing the number of driving PZT actuators at the same time has been proposed. Basic characteristics of the proposed actuator and driving methods have been experimentally investigated.
