ロボティクス・メカトロニクス講演会講演概要集
Online ISSN : 2424-3124
セッションID: 1P1-C17
会議情報
1P1-C17 超音波振動を利用した基板の非接触搬送技術 : 非接触ガイドの開発(生産システム・生産機器メカトロニクス)
磯部 浩已久曽神 煌
著者情報
会議録・要旨集 フリー

詳細
抄録
In recent years, plane substrates and semiconductor wafers become larger year by year. Therefore, some problems occur such as fracture and stain of substrates under conventional contact transportation. In order to solve these problems, a new non-contact transportation technology is proposed in this study. The substrates are levitated by an aerostatic force and transported by the acoustic viscous force by the traveling wave of flexure stator deformation. In this paper, transportation unit with derailment prevention capability is proposed and experimental results are presented.
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© 2008 一般社団法人 日本機械学会
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