2A1-F01 近接場エリプソメトリー顕微鏡の開発 : 光学系の開発(MEMSとナノテクノロジー)

抄録

In this research, it is tried to measure the local birefringence of the sample quantitatively. In this paper, the scanning near-field ellipsometer system (SNEM) with an apertureless probe has been created. Moreover, the method of observing birefringent distribution and the measurement result of the sample (ethylene vinylacetate film and poly-imide rubbing film) has been described. From these results, this apparatus developed in this study promised to be valuable for anisotropic samples with microstructure and for applications in many fields.