Abstract
The evaluation in various, minute areas is developed as the nanotechnology in recent years develops. Especially scanning near-field optical microscope (SNOM) can measure a sample in resolving power beyond the diffraction limited of the light. But there are the problems that resolving power is limited by influence of the opening of the probe tip to use. So, in this research, it is aimed that development of scanning near-field ellipsometry microscope (SNEM) which is not affected by the probe opening. In this paper, control software in SNEM had been created. As a result, the positioning of the probe and the angle control of the rotary analyzer were succeeded in.
