2A1-F03 Design and Fabrication of Silicon Photonic MEMS Modulators covered with Parylene Protection

Abstract

We have already reported the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents the tolerability of parylene against HF vapor and BPM TE mode simulation of silicon wire waveguide with parylene upper clad in order to combine conventional photonic IC technology.