抄録
This paper tries demonstrating a parallel linear actuator system providing a large stepping motion based on the concept of electrostatically controlled linear actuator system. A developed system employs a commercialized precision positioning stage as its driving oscillator, while the system used to use a precise piezoactuator. The actuator system provides a large step by using a large stroke of the precise positioning system. Electrodes for the electrostatic clutch mechanism were micromachined on the stage. The silicon slider achieves 50μm - 5mm step motion by using the principle of electrostatically controlled linear actuator system.
