The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2008
Session ID : 2P1-C22
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2P1-C22 In situ Tensile Tests Using Silicon Microchip by TEM Nanomanipulator
Masahiro NAKAJIMA, Taeko ANDO, Hidekazu ISHIHARA, Shigeki NAKAO, Shigeo ARAI, Kazuo SATO, Toishio FUKUDA
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Keywords: Nanomanipulator, Silicon microchip, Transmission Electron Microscope, In situ tensile test
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Abstract
In situ tensile tests of single crystal silicon beam are presented inside a Transmission Electron Microscope (TEM) by the nanomanipulator using silicon microchips. The process of cleavage creation is determined for a silicon beam by a CCD camera. The bend contours of the silicon beam are observed with the high resolution TEM images in a real-time scale.
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© 2008 The Japan Society of Mechanical Engineers
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