Abstract
We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass bonded PDMS to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS chip. As a result, we succeeded in dispensing of droplets by vibrating the membrane using the piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by SU-8 to obtain the hydrophobic surface which prevents any undesired satellite dropletsproduced. Consequently the accuracy of position of the droplet dispensing was achieved ±5μm. The size of the droplet produced from the disposable nozzle (diameter=100μm) was in the range of 95-105μm at the applied voltage of 105V.
