抄録
In this research, the SMA thin film actuator has been driven by heat of infrared radiation laser. Fabricated SMA actuator can be driven under specific environment by converting light energy into thermal energy. Optical adhesive has been used for an energy transmission from light source. The actuator consisted of a stainess steel substrate, a SMA, and optical waveguide. The optical waveguide allow downsizing the device because waveguide pattern can be easily formed by RIE (Reactive Ion Etching). The length of the driving part was 5mm. The displacement value of SMA thin film actuator was 1.2μm when the irradiated optical output was 766mW.
