Abstract
In this paper we describe how to develop the capacitive sensor for tactile sensing. We try to make it more sensitive and improve environmental adaptability. To make it possible, we pack water as ferroelectric liquid so that it can keep high permittivity and flexibility. By packing water, we expect 80.4 times higher permittivity than air. The capacitive sensor is made of PDMS (polydimethylsiloxane) and with photolithography technique so that we can make micro scale device. The size of the electrode is 25mm^2 and thickness is 20μm, and we try to put different type of tactile sensor together to realize human tactile closely.
