抄録
Recently, an industrial robot has engaged in various works. In the near future, robots will be required to work out difficult assemblies instead of human. Even though high sensitivity of force sensor is needed for difficult assembly, it is inferior to that of human. Therefore, force sensor should be developed so that the sensitivity of it would catch up with that of human. In the past, a variety of kinds of research about force sensors are conducted. However, they have neither wide range nor high durability. In this paper, we proposed a tuning fork type piezo-electric vibration sensor. It is possible to obtain both of high sensitivity and high durability due to multi vibration mode. In this paper, the frequency characteristics of sensors are measured for the difference of inner diameter of tuning fork. And, FEM analysis is also conducted to investigate the effect of air layer of tuning fork.
