1A2-E03 Real-time Live Cell Surgery Based on Electron Beam Lithography : Approach to Control Biomolecular Using Low Energy Electron Beam(Nano/Micro Bio System)

Abstract

This paper reports a novel nanofabrication method for living cell. Our method provided both nano deposition and ablation on a living cell in nanoscale resolution. This paper will show nanostructures fabrication using this electron beam (EB) induced deposition, and will also report cell response for EB direct drawing. Conventional onsite processes for the live cells were reported as laser induced process in micro scale resolution. Our process has nanoscale resolution because of using focused electron beam. We proposed our method for live cell processible nanofabrication to analyze protein scale dynamic reaction on cell system.