Abstract
Photo driven actuators have received an attention in recent years. PLZT has a photostrictive effect and can be driven by non-contact energy supply. In this study, PLZT films have been deposited by using a hydrothermal method. The growth and the condition of crystals would depend on a reactive temperature and an amount of reagent. The depositing condition of PLZT films has been improved and the characteristics of the films have been evaluated. Additionally, PLZT film actuators have been fabricated and those actuators have been driven by the ultraviolet lays. By measuring displacement, electric current and generative force, the PLZT thin film actuators have been evaluated.
