Abstract
In this research, an ultrasonic vibration mixing device for the hydrothermal deposition system has been designed. A PZT thin film has been deposited on a titanium plate by the hydrothermal method with the fabricated new ultrasonic vibration mixing device. To improve a stir performance, the ultrasonic vibration mixing device has been designed by using the finite element method. The new vibration mechanism has been evaluated. The pressure of 396[kPa] was generated in the autoclave. This value was about twice larger than that of the vibration mechanism of the previous model. The deposited PZT thin film has been observed by the SEM.
