Abstract
We report the micro fabrication system using Proton Beam Writing for micro chemical chip. The fabrication system utilizes the XY stage control and beam scan base on CAD data. The XY stage control enables this system to spread the fabrication area with centimeter order. Moreover, the method of calculating the scan pattern from general CAD data enables this system to fabricate various shapes. The experimental results demonstrate the centimeter structure which included 121 micro arrays whose diameter is 6 micrometer. This fabrication system using PBW is useful for the micro chemical chip fabrication.
