抄録
Electro-Conjugate Fluid (ECF) is a kind of functional and dielectric fluid. When a high DC voltage is applied to a pair of electrodes immersed in the ECF, a strong and active jet flow of ECF (ECF-jet) is generated between these two electrodes. A high power tube-type ECF micropump that consists of triangular prism and slit electrode pairs was proposed and fabricated by MEMS technology including photolithography with thick photoresist and nickel electroplating in the previous report. In this paper, we present advanced ECF micropumps in which the electrode pairs were serialized and parallelized for high performance in demand. The experiment results of the ECF micropumps show that parallelizing the electrode pairs does not affect output pressure significantly and also prove that the flow rate is proportionally dependent on the number of parallelized electrodes.
