抄録
We have been developing the Proton Beam Writing System to fabricate micro chemical chips. The micro fabrication process using the imprint technology was verified as one of the proton beam writing system. Though the Ni molding with micro structures was fabricated using the electroless plating, there were problems such as the thermal expansion of the resist and the adhesive force of the Ni plating. By solving these problems, the Ni molding with micro structures succeeded in using the electroless plating. In addition, the thermoplastic polymer, PET succeeded in imprint using the Ni molding molding. The proton beam writing system has the potential to be able to fabricate the micro chemical chips incorporating novel sensors and filters.
