Abstract
In the previous paper, we used a semiconductor laser and a position sensing detector(PSD) to measure two DOF position of spherical ultrasonic motor(SUSM) and the effectiveness was confirmed. However, we have not realized three DOF position detection and control. Therefore, in this paper, we develop a new spherical rotor with two built-in semiconductor lasers to measure three DOF position of SUSM. Experiments are examined and the precision of the system is investigated.
