Abstract
Atomic force microscope (AFM) can observe nanometer-scale surface topography of the sample in various environments. In addition, it is possible to fabricate the surface using the same probe. However, AFM imaging has the problem that it takes at least several minutes to obtain the surface image. In this study, we have developed a nano fabrication method by combining high-speed imaging technology with the AFM probe manipulator system using a haptic device for human interface. It is possible to nano fabrication under the high-speed imaging. Therefore, the operator can monitor the nano fabrication scene by high-speed imaging. In addition, the operator can feel surface reaction by using haptic device.
