抄録
Microchannel fabricated using MEMS technology have developed and contributed to the area of chemistry, biology and medical procedure. We think that three-dimensional (3D) microchannel with circular cross-section can contribute to development of these areas. In this research, our purpose is fabrication of the 3D microchannel with circular cross-section for simulation of capillary vessels. To fabricate the 3D microchannel with circular cross-section, we employ 3D exposure method using femtosecond laser and mask hybrid exposure (FMEx). FMEx makes it possible to fabricate a millimeter-sized large structure with submicrometer resolution in three dimensions and achieves easy injection of solution because it is possible to fabricate typical microchannel used for the inlet or outlet port of the model at a short time. In this paper, we fabricated 3D microchannel whose diameters are approximately 5.6 μm for replication of capillary vessels.
