抄録
This paper reports development of MEMS displacement amplification mechanism using latex. The actuator which was developed by our laboratory consists of piezoelectric actuators and hydraulic displacement amplification mechanism (HDAM) that encapsulates liquids in micro-chambers with two flexible polymer membranes. HDAM can amplify the displacement of MEMS actuator, so the actuator can output tactile feelings to human's fingertip. In order to increase amplification ratio of HDAM and give textures was created by tactile display more smooth, we developed new construct and fabrication process of HDAM. We used the latex for material of membrane was used HDAM contact part. For making more smooth textures, we developed the tactile display which has 5 x 5 large-displacement MEMS actuators. At last, we investigate the characteristic of new HDAM and successfully showed the potential of creation better tactile feeling by great amplification ratio and drive frequency because of using latex.
