Abstract
In previous report, we have reported that 3 degrees of freedom precise mobile mechanism that is composed of three solenoid actuators and 4 "Moonie" piezoelectric actuators. The mechanism moves like an inchworm by an synchronization of an alternately fixing of two legs to a floor and vibrations of the piezoelectric actuators. However, this mechanism does not move precisely as designed because of ununiformity of the static forces among 6 legs and the floor. In this report, we have described newly-proposed frictional force control method based on the internal force feedback control of the 3 solenoid actuators with 6 pressure sensors attached to the 6 legs.
