Abstract
Pneumatic actuators can achieve compliance and flexibility easily. For the above-mentioned reasons, pneumatic actuators are used in widely fields of medical treatments and industries. However the pneumatic control vale that can control air flow rate smoothly is large scale weigh. The purpose of this study is development of the new flow control valve using torsional vibration. This valve can control air flow continuously and drive by power saving. In this report, firstly we show basic mechanism of the valve and expound the advantage to drive by low power. Next we designed the prototype of this valve using FEM. Finally, we confirmed the principle of the valve.