抄録
The purpose of this study is development of the flow control valve which is small in size, lightweight and can control air flow proportionally. In this study, we thought about a condition that makes flow rate proportional to applied voltage taking the vibration property of orifice plate into consideration. To verify whether the condition is appropriate to flow control valve using particle excitation, a prototype using Langevin type transducer structure that aims at application to proportional valve has been designed by using finite element method and made. And we have evaluated the vibration property and flow rate of the prototype.
