Abstract
Precision and accuracy of the last one step is very important for precise work. Visual feedback technology with CCDcamera is powerful method to measure the robots' positions, however the measuring speed is only 0.1 second if we use 500M-pixel-camera. That is the reason why the visual feedback technology is not good enough for controlling the robot high speed because we cannot measure velocity with sufficient resolution. Optical linear encoders have attracting performances because their measuring speed is very fast, over 1m/s, with sufficient measuring resolution, less than 0.5 μm. However, there are almost no reports that show the design of integrated three-degrees-of-freedom (3DoF) inner position sensors within one step-motion for those precise mobile mechanisms. In this research, we present a newly proposed design of the integrated 3DoF inner position sensor. We also explain how to obtain 3DoF displacements from the four measured distances.
