Abstract
This paper proposes the novel method for measuring the mechanical property of cells by using Direct-Outer-Drive mechanism (DOD mechanism). This DOD mechanism enables robot-integrated microfluidic chips to manipulate single cell about the size of 10 μm. In order to achieve this mechanism, we made an actuating structure on the microfluidic chip with SOI(Silicon On Insulator) wafer which has a 40 μm slice of active silicon layer. On the opposite side of the actuator we made a force sensor composed of cuffed forms of beams. While measuring the cell, we get the displacement of the force sensor and the actuator and translate it into cellular reactive force and deformation ratio. Finally we succeeded in measurement of single (MDCK) cell with the size of 15 μm by using the chip.
