Abstract
We proposed and developed an electro-conjugate fluid(ECF) micropump which could be integrated inside the fluid channel three-dimensionally. ECF is a type of functional fluid which could generate strong jet(ECF jet) between the electrodes under high DC voltage. Designing the structure of pumping electrode is very important in order to make more powerful ECF micropump. To combine the easy fabrication and good performances, we proposed a novel ECF micropump that consists of a pentagonal prism electrode array by MEMS technology. Both strong ECF flow and high output power density are realized as results. Compared with the conventional structure, the electrode density is reduced by 55% with the same output pressure.
