抄録
In this study, we describe design and development of dead-reckoning navigational system for the mechanism. The mechanism has two Y-shaped electromagnets (EMs) and six piezoelectric actuators (PAs). This mechanism moves like an inchworm when sinusoidal displacement of PAs and rectangular sticking force to a floor of EMs are synchronized. We measure relative displacements in X, Y, and θ axes between two EMs by three optical linear encoders as its internal sensor. We also measure the mechanism's position and posture from CCD-camera image by an image analyzer to check the navigational performance of the inner sensor. In experiments, we make the mobile mechanism follow an octagon path with 45 degrees rotation at every apex by the inner sensor. We also discuss basic design and expected performance of combination of the inner and outer sensor based tracking control for applying this tiny mobile mechanisms to bio-medical and chip parts assembling applications.