抄録
Pneumatic actuators have several advantages: high compliance, lightweight, safety, and low-cost. However, because pneumatic actuators have nonlinearity, the control of pneumatic actuators is very complex. Therefore, high controllability and high response devices are demanded. We have designed the flow control valve that can control flow rate smoothly. This flow control valve has simple structure using PZT resonance mode. In this paper, we aimed at stability of flow rate of the valve, and designed new orifice plates. From the results, we verified the condition to steady flow rate of the valve.
