抄録
This paper presents a fabrication of graphene cubic structure by a nanomanipulation in a FESEM (Field Emission Scanning Electron Microscope). We developed two nanomanipulators with three degrees of freedoms to handle two end-effectors. A cube net was designed and fabricated using a multi graphene by a FIB (Focused Ion Beam) etching. For bending the one side of the cubic net graphene, a tungsten probe was used after reforming by FIB etching to adjust the cube net design. The multi graphene was bent to form a cubic 3D structure in study. Additionally, the bending forces of multi graphene were measured using a silicon cantilever based on the nanomanipulation.
