Abstract
Recently, demands of small and high-sensitivity load sensor are increasing. However, the conventional sensors, for example, strain gauges, beam structures, and capacitance sensors have a problem that rigidity of the sensor becomes low as long as sensitivity becomes high. In consequence, high-throughput sensing is difficult because the resonance frequency of the sensors becomes low. Here we present the high-sensitivity load sensor using quartz crystal resonator (QCR). QCR has superior characteristics such as high accuracy, improved strength under compressive stress, and long-term stability. We succeeded in miniaturizing the conventional QCR sensor and improved its sensitivity. For further downsizing, we demonstrated the fabrication method for ultra-small QCR sensor.
