1P1-P03 Aqueous Observation using SEM-CT inside Environmental-SEM

Abstract

This paper presents the aqueous observation of three-dimensional information using scanning electron microscope- computed tomography (SEM-CT) inside an environmental-SEM (E-SEM). It is required to control the sample temperature for an aqueous condition inside the E-SEM. In this paper, a cooling system was installed into the SEM-CT system. The aqueous observation was confirmed by the E-SEM and SEM-CT observations.