MEMS型触覚デバイスの試作

抄録

One is contact force sensation and others are vibration methods in researches of tactile display. Vibration methods are suit for slip sense. Contact force sensation is not suit for wearable display. Therefore, we use MEMS technology to represent high-density stimuli. We improved the layout of cantilever actuator and confirmed performance of actuator using FEM analysis. We also considered process of MEMS device and made the metal mask of patterning. C-axis orientation was confirmed PZT film using sputter deposition.