The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2016
Session ID : 2P2-19b1
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Development of a microstereolithography system using a 405 nm diode laser and application to nanoimprinting
Fuminori NAGASEShuhei TANIGUCHIMasahiro MITAShoji MARUO
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Abstract

In this study, a versatile microstereolithography system using a low-cost blue diode laser was developed. This system enables to generate pinpoint photopolymerization at a focused spot inside a liquid photopolymer like two-photon microfabrication using a femtosecond pulsed laser. It can provide multiscale fabrication owing to the unique property of single-photon polymerization. A microstereolithograpy system using a 405 nm diode laser and galvano-scanner set was constructed. After investigating a suitable photopolymer by absorbance measurement, the fabrication resolution of this system was examined in experiments. In addition, three-dimensional (3D) microstructures including micro lattice models and movable microparts were successfully fabricated. Moreover, additive fabrication of 3D microstructures on patterned films produced by nanoimprinting was demonstrated.

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© 2016 The Japan Society of Mechanical Engineers
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